发明名称 Mask, method of fabricating the same, and method of fabricating organic electro-luminescence device using the same
摘要 This invention relates to a mask, a method of fabricating the same, and a method of fabricating organic electro-luminescence device using the same that is capable of minimizing a difference of a rigidity coefficient value of both an open part and a blocking part. The mask includes: an open part formed in a hole type to pass an organic material for forming a first organic layer on a substrate; and a blocking part having a plurality of grooves formed at other areas except for the open part.
申请公布号 US7824823(B2) 申请公布日期 2010.11.02
申请号 US20050047693 申请日期 2005.02.02
申请人 LG DISPLAY CO., LTD. 发明人 LEE IL HO;PARK CHONG HYUN;BAE HYO DAE
分类号 G03F1/00;H05B33/10;B44C1/22;C23F1/00;G03F7/00;G03F7/12;G03F7/40;H01L27/32;H01L51/00 主分类号 G03F1/00
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