发明名称 |
A REACTOR WITH SILICIDE-COATED METAL SURFACES |
摘要 |
<p>In an embodiment, a reactor includes a section, wherein at least a portion of the section includes a base layer, wherein the base layer has a first composition that contains a silicide-forming metal element; and a suicide coating layer, wherein the suicide coating layer is formed by a process of exposing, at a first temperature above 600 degrees Celsius and a sufficient low pressure, the base layer having a sufficient amount of the silicide-forming metal element to a sufficient amount of a silicon source gas having a sufficient amount of silicon element, wherein the silicon source gas is capable of decomposing to produce the sufficient amount of silicon element at a second temperature below 1000 degrees Celsius; reacting the sufficient amount of the silicide-forming metal element with the sufficient amount of silicon element, and forming the suicide coating layer.</p> |
申请公布号 |
WO2010123873(A1) |
申请公布日期 |
2010.10.28 |
申请号 |
WO2010US31718 |
申请日期 |
2010.04.20 |
申请人 |
AE POLYSILICON CORPORATION;FROEHLICH, ROBERT;FIESELMANN, BEN;MIXON, DAVID;TSUO, YORK |
发明人 |
FROEHLICH, ROBERT;FIESELMANN, BEN;MIXON, DAVID;TSUO, YORK |
分类号 |
B05D3/04 |
主分类号 |
B05D3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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