| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device which simply sets upper limit allowances and lower limit allowances for measured values at a plurality of measuring points, which are used for performing pass/fail determination of electric characteristics of measuring samples, even if the number of the measuring points are large, and to provide a method for setting a pass/fail range for the measuring samples. SOLUTION: There is provided a method which includes: a step 41 where the plurality of measuring points are previously set; a step 42 where the number of measurement of conforming samples are set; a step 43 where electric characteristics of all conforming samples are measured and recorded repeatedly for all the conforming samples at each measuring point; a step 46 where an inspection reference value is calculated by averaging measured values for each measuring point; a step 47 where an upper limit breadth and a lower limit breadth are set; a step 48 where the upper limit breadth is added to each inspection reference value to calculate an upper limit allowance in each measuring point; and a step 49 where the lower limit breadth is subtracted from each inspection reference value to calculate a lower limit allowance in each measuring point; and the inspection device which performs these processings. COPYRIGHT: (C)2011,JPO&INPIT |
