发明名称 PUMP SYSTEM FOR DELIVERING LIQUID
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a pump system for delivering liquid by simplifying a structure and the control of a pump system. <P>SOLUTION: The pump system includes a pump 10 sucking an electrolyte from a suction passage 61 to a pump chamber 11 based on the supply of operation air and delivering the electrolyte from the pump chamber 11 to a delivery passage 62 based on the discharge of the operation air, a suction side valve 20 opening the suction passage 61 based on the supply of the operation air and closing the suction passage 61 based on the delivery of operation air, and a delivery side valve 30 closing the delivery passage 62 based on the supply of the operation air and opening the delivery passage 62 based on the discharge of the operation air. The pump system includes branch passages 71 (71a, 71b, 71c) connected to the pump 10, the suction side valve 20, and the delivery side valve 30, respectively, and a collection passage 72 collecting the branch passages 71. The supply and discharge of operation air to the collection passage 72 is changed over by an electromagnetic valve 40. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010242684(A) 申请公布日期 2010.10.28
申请号 JP20090094330 申请日期 2009.04.08
申请人 CKD CORP 发明人 KAJITA AKIRA;NISHIMURA AKINA
分类号 F04B53/10;F04B9/127;F04B9/135;F04B13/00;F04B49/06;H01L21/027 主分类号 F04B53/10
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