发明名称 FILM FORMING MASK AND MASK ADHESION METHOD
摘要 <p>A film-formation mask and mask-affixing method with exceptional commercial utility is provided, whereby it is possible to achieve good adhesion to a substrate 6 and to form a film with good film pattern precision. The present invention provides a film-formation mask comprising a mask main body 1 having a pattern of openings through which a film-formation material is allowed to pass, and a holding frame 2 for holding the mask main body 1, a substrate 6 on which the film-formation material is deposited via the pattern of openings being layered on the film-formation mask; the film-formation mask characterized in that the holding frame 2 is provided with a pair of holding parts 4 for holding a pair of side parts 3, respectively, the pair of holding parts 4 being arranged along the pair of opposing side parts on the four sides of the mask main body 1; and the holding frame 2 is configured so that the mask main body 1 is held only by the pair of holding parts 4; the mask main body 1 bends under the weight thereof between the pair of side parts 3 held by the pair of holding parts 4; and the pair of side parts 3 is secured to the pair of holding parts 4 so that the amount bending varies in the opposing direction of the pair of side parts 3.</p>
申请公布号 KR20100114883(A) 申请公布日期 2010.10.26
申请号 KR20107015382 申请日期 2008.11.14
申请人 TOKKI CORPORATION 发明人 KONDO YOSHINARI;SUZUKI KENTARO;MATSUMOTO EICHI;KOBAYASHI YOSHIHIRO;ISHIKAWA KIICHIRO
分类号 C23C14/04 主分类号 C23C14/04
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