发明名称 Semiconductor device and method for fabricating the same
摘要 A semiconductor device and a method for fabricating the same are provided. The semiconductor device includes: an inter-layer dielectric (ILD) layer formed on a semiconductor substrate; a contact plug formed in the ILD layer, such that a predetermined portion of the contact plug protrudes above the ILD layer; an etch stop layer formed on the ILD layer exposing a top portion of the contact plug; and a bottom electrode of a capacitor formed partially in the etch stop layer to be isolated from the ILD layer by the etch stop layer and the contact plug to prevent a direct contact with the ILD layer, and to be partially contacted with the contact plug.
申请公布号 US7820507(B2) 申请公布日期 2010.10.26
申请号 US20050296098 申请日期 2005.12.06
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHOI HYUNG-BOK
分类号 H01L21/8242 主分类号 H01L21/8242
代理机构 代理人
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