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发明名称
Polierkopf und diesen aufweisende Poliervorrichtung
摘要
申请公布号
DE112008002802(T5)
申请公布日期
2010.10.21
申请号
DE20081102802T
申请日期
2008.10.20
申请人
SHIN-ETSU HANDOTAI CO. LTD.;FUJIKOSHI MACHINERY CORP.
发明人
MASUMURA, HISASHI;MORITA, KOUJI;HASHIMOTO, HIROMASA;ARAKAWA, SATORU;KISHIDA, HIROMI
分类号
B24B37/30;B24B41/06;H01L21/304
主分类号
B24B37/30
代理机构
代理人
主权项
地址
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