AMMONIUM FLUOROALKANESULFONATE, AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an intermediate useful for producing an onium fluoroalkanesulfonate useful as a photoacid generator or the like for use in a resist material of a chemical amplification type, and an industrial method for producing the same. SOLUTION: An ammonium hydroxyfluoroalkanesulfinate is produced by using an organic base upon sulfinating a bromofluoroalcohol using a sulfinating agent. By oxidizing the resulting compound, an ammonium hydroxyfluoroalkanesulfonate is obtained. An onium fluoroalkanesulfonate is produced by exchanging the resulting ammonium salt as a raw material into a corresponding onium salt via esterification. COPYRIGHT: (C)2011,JPO&INPIT