| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type pressure sensor for restraining a zero-point shift by restraining a pressure-sensitive diaphragm from being deflected, even when a medium to be measured is deposited and accumulated onto the pressure-sensitive diaphragm. SOLUTION: The capacitance type pressure sensor 10 equipped with a pressure sensor chip for detecting an electrostatic capacitance in response to pressure of the medium to be measured is constituted to make one face 114b of a sensor diaphragm 114 of the pressure sensor form a pressure introducing chamber side for introducing the medium to be measured, and to make the other face 114a thereof form a capacitor chamber side for forming a capacitor part, and the central part 114g of the sensor diaphragm includes a material different from that of the peripheral edge part 114f of the sensor diaphragm 114 forming a boundary with respect to diaphragm fixing parts 16, 17 in the capacitor chamber side, and the material 115 of the central part 114g is a material having a rigidity lower than that of the material of the peripheral edge part 114f. COPYRIGHT: (C)2011,JPO&INPIT
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