| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently recover metal ions, phosphinic acid ions and monovalent complexing agent ions and to efficiently separate phosphorous acid ions and impurity metal ions existing in plating liquid. <P>SOLUTION: A method of regenerating electroless plating liquid includes a treatment for passing an electroless plating liquid containing main metal ions, hypophosphite ions, a complexing agent of the main metal ions and phosphite ions through a cation-exchange resin to obtain a metal-separated plating liquid from which metal ions are separated and which contains the hypophosphite ions and the phosphite ions, a treatment for eluting the metal ions adsorbed on the cation exchange resin by an elution liquid and separating and recovering the main metal ions and a treatment for separating the metal-separated plating liquid by electrodialysis into a monovalent anion solution containing the hypophosphite ions and monovalent complexing agent ions and a multivalent anion solution containing phosphite and bivalent or more complexing agent ions. <P>COPYRIGHT: (C)2011,JPO&INPIT |
