| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezo-electric element which suppresses film peeling and the generation of a short circuit, and improves a piezo-electric characteristic. <P>SOLUTION: The piezo-electric element 100 is a three-layered structure in which a single diffusion prevension layer 12 and a piezo-electric layer 13 are laminated on a substrate 7 in this order including the substrate 7. The diffusion prevention layer 12 and the piezo-electric layer 13 are films formed by an aerosol deposition method, respectively, and the elastic modulus of the diffusion prevention layer 12 is of the elastic modulus of the substrate 7 or smaller and of the elastic modulus of the piezo-electric layer 13 or greater. The diffusion prevention layer 12 is composed of zirconia added by alumina, a titanate lead zirconate, or zirconia having a film thickness of 5 μm or larger. <P>COPYRIGHT: (C)2011,JPO&INPIT |
