| 摘要 |
PROBLEM TO BE SOLVED: To maintain the frequency characteristics of a high-frequency voltage impressed in a stable manner apart from a chuck voltage, and avoid an increase in reflection loss, in an electrostatic chuck device with a structure of impressing the chuck voltage to a chuck electrode by a feeding connector. SOLUTION: The chuck voltage is impressed to the chuck electrode 27 of an electrostatic chuck substrate 12 by a feeding connector 24 for electrostatic chuck through an introducing electrode 25. The feeding connector 24 for electrostatic chuck is equipped with a spring member 42 consisting of a coil spring that energizes a feeding pin 41 to the side of the chuck electrode 27. The spring member 42 is insulated from a substrate base 11 by an insulating collar 43, and grounded through a lid member 32. Therefore, the frequency characteristics of the high-frequency voltage impressed to the substrate base 11 can be maintained in a stable manner. COPYRIGHT: (C)2011,JPO&INPIT |
