| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process monitoring device and a process monitoring method, for accurately calculating a predicted value of process data. <P>SOLUTION: The device includes: an approximate expression calculation unit 5 which calculates an approximate expression by least squares method based on a process data group DV obtained earlier by a predetermined time than the current time; a prediction value calculation unit 6 which calculates a prediction value of process data to be obtained after a predetermined time based on the approximate expression; and an output processing unit which outputs the prediction value and tendency prediction and also gives an alarm when the prediction value exceeds a predetermined range. As a reference expression that is the base of the approximate expression, a high-order expression is applicable in addition to a primary expression, and an optimum one is preferably applied according to the process data. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
