METHOD FOR DIRECT-LASER PATTERNING OF THIN FILM

摘要

PURPOSE: A method for directing patterning a thin film with laser is provided to form a wanted thin film pattern on a substrate and increase a patterning speed by separating the thin film with a single pulse. CONSTITUTION: A light transmitting substrate is provided. A laser absorbing metal layer is formed on one side of the substrate. An ITO layer is formed on the laser absorbing metal layer. A pulse beam laser beam is irradiated on the surface without the laser absorbing metal layer and the ITO layer by passing through a spatial light modulator. A pattern corresponding to the pattern of the spatial light modulator is formed on the laser absorbing metal layer and the ITO layer by separating the laser absorbing metal layer and the ITO layer from the substrate.