METHOD OF SETTING INSPECTION AREA

摘要

PURPOSE: A set up method of a check field, which compensates the distortion of a measurement target, is provided to accurately set a check field about a measurement target by compensating the distortion of a measurement target based on the change amount of the measurement target due to distortion. CONSTITUTION: A set up method of a check field is as follows. The measurement target is arranged on a stage(S110). Information data about the measurement target is gathered(S120). Image data about the measurement target is obtained(S130). One or more feature object is selected based on the information data and image data about the measurement target(S140). A parameter value about feature variable of selected target is extracted respectively from information data and image data(S150).