| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus, method for determining a graph drawing period in the substrate processing apparatus, and a graph drawing method, for preventing shortage of an available resource from occurring. <P>SOLUTION: In the substrate processing apparatus 1, data such as medicinal solution flow are obtained in a fixed data collection period DT by a data collection part 22. The obtained data are temporarily stored in a data buffer 21. A graph drawing period GT matching a period, in which the data are read from the data buffer 21, is determined on the basis of a CPU use rate to be one example of the use situation of the resource of a computer 2. Then, data are read from the data buffer 21 in the determined graph drawing period GT, and a graph, which indicates the time change of the data, is drawn on a display 31 of an operation panel 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |
