| 摘要 |
PROBLEM TO BE SOLVED: To prevent a slip of a substrate when the substrate is carried by a carrying robot, and also to prevent displacement generated when the substrate is transferred on a substrate holder from the carrying robot. SOLUTION: The carrying robot 49 provided with an imaging device 12 at the tip of a carrying arm 4 is included to detect the location of the substrate 7 set in a treatment chamber 8. The carrying arm 4 is extended again to the treatment chamber 8 after the transfer of the substrate to the treatment chamber 8 is completed to measure locations of the substrate 7 and each external circumferential edge of the substrate holder 10 for obtaining each center coordinate Os of the substrate 7 and the center coordinate Ob of the substrate holder 10 by algebraic computation. When locations of both the center coordinates Os and Ob are not matched with each other substantially, it means that the displacement of the substrate 7 occurs. Therefore, the substrate 7 is moved again by the carrying robot 49 in a direction for correcting the displacement. COPYRIGHT: (C)2011,JPO&INPIT
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