摘要 |
PROBLEM TO BE SOLVED: To provide a roller hearth for atmospheric baking capable of providing the whole furnace with homogenous atmosphere, and hardly causing vertical temperature difference of a baked object. SOLUTION: In this roller hearth kiln, an upper space of a roller 2, to which the baked object such as an electronic component is transported, is divided into an upper ceiling chamber 8 and a lower furnace chamber 9 by a horizontal perforated ceiling plate 6. An atmospheric gas supplied from an atmospheric gas supply pipe 10 penetrating through a ceiling wall of a furnace body 1 is accumulated in the ceiling chamber 8, preheated, and then supplied into the furnace chamber 9 through the perforated ceiling plate 10. A heater 13 is disposed in a lower space 12 of the roller 2 to perform heating from a lower face. Thus the temperature distribution and atmosphere can be unified. COPYRIGHT: (C)2011,JPO&INPIT
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