METHOD FOR MANUFACTURING ELECTROSTATIC ACTUATOR, METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGING HEAD, AND METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrostatic actuator, for accurately forming a high lubricant hard film in an optional dimension on a diaphragm part. SOLUTION: The method for manufacturing the electrostatic actuator includes: a step of forming the high lubricant hard film (DLC film 20) on a surface position of an insulating film 19 corresponding to the diaphragm 8; a step of forming an etching protection film 21 protecting the insulating film 19 and the high lubricant hard film; and a step of performing etching from a surface on an opposite side to a surface where the diaphragm 8 is formed of a silicon substrate 3'. COPYRIGHT: (C)2011,JPO&INPIT