| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous drying furnace for flat plate-shaped workpieces preventing nonuniform drying of a substrate due to a position in the furnace width direction even when a large workpiece is dried and preventing the possibility that a condensed solvent is dropped down from a ceiling on the workpiece. SOLUTION: Air supply heating units 7 each formed by integrating an air supply device with a heating device are arranged over the entire furnace interior region inside a furnace chamber 3 to which the flat plate-shaped workpiece W is continuously carried by rollers 4. A space above the air supply heating units 7 serves as an air supply space 9, a space below the air supply heating units 7 as a drying space 10 and a space below the workpiece W as an air discharge space 11. The air supply heating units 7 include air supply ports continued to the furnace width direction and heater heating faces. The air supply heating units 7 can be drawn to the furnace width direction and easily maintained. COPYRIGHT: (C)2011,JPO&INPIT
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