| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for inhibiting mixing of impurities into a borazine compound after being drawn, in the filling method of supplying the borazine compound to a container having an introduction pipe and a discharge pipe which have valves midway and are connected to the upper portion of the container through the introduction pipe to fill it in the container. SOLUTION: The filling method comprises supplying a hydrolyzable compound to a container 10 having an introduction pipe 11 and a discharge pipe 12 which have valves 13 and 14 midway, respectively, and are connected to the upper portion of the container through the introduction pipe to fill the hydrolyzable compound in the container, and after filling the hydrolyzable compound, a deposit composed of the hydrolyzable compound or a decomposed product thereof attached to the inner wall 11' on the open end side of the introduction pipe is removed. COPYRIGHT: (C)2011,JPO&INPIT
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