| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for manufacturing an electrooptical device having constitution preventing a rubbing defect of an alignment film by preventing foreign matter from sticking on the alignment film from rubbing cloth by easily and securely removing the foreign matter sticking on the rubbing cloth. SOLUTION: The device for manufacturing the electrooptical device includes a stage 61 on which a substrate 10' having the alignment film 16 formed is mounted, a rubbing roller 62 for carrying out rubbing processing on the alignment film 16 by bringing the rubbing cloth 63 into contact with the alignment film 16 on the substrate 10' mounted on the stage 61, and a nozzle 65 provided nearby the rubbing cloth 63, and having, on a surface opposed to the rubbing cloth 63, a spray hole for blowing gas to the rubbing cloth 63 and an air intake for sucking the gas blown from the spray hole and the foreign matter removed from the rubbing cloth 63 with the gas. COPYRIGHT: (C)2010,JPO&INPIT
|
