METHOD AND DEVICE FOR SIMULTANEOUS MICROSTRUCTURING AND PASSIVATING

摘要

The invention relates to a method for simultaneously microstructuring and passivating siliceous solid bodies by means of a fluid jet-guided laser process. Local heating of the solid body surface occurs due to the laser, while a precursor for passivating the solid body surface is present in the fluid jet. The invention further relates to a device for simultaneously microstructuring and passivating. The method is used in particular in the production of solar cells.