| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a delivering opening with favorable positional accuracy between a flow path and a substrate and having high shape accuracy in a method for manufacturing a liquid delivering head. Ž<P>SOLUTION: The method for manufacturing the liquid delivering head comprises: a process for forming a pattern 9a of the flow path by patterning a first layer 9 using a second layer 10a having absorption on an i line and a photosensitive wavelength of the first layer 9 as a mask; a process for forming a coating layer 3 being a flow path wall member so as to cover the flow path pattern 9a and the second layer 10a; and a process for patterning the coating layer including light exposure by light with an absorbable wavelength by the second layer 10a to form the delivering opening 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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