| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope apparatus capable of sufficiently cooling a heat generation source without causing vibration, noise, dust and stray light. SOLUTION: A coolant circulation path C is constituted by connecting a heat generation source cooling part 61 configured to supply a liquid coolant to a heat generation source such as a lamp so as to cool the heat generation source, and a circulation device 50 for circulating the liquid coolant by means of a tube 60. By this constitution, the heat generation source can be sufficiently cooled without generating the vibration, the noise, the dust and the stray light, etc., resulting from the drive of a fan that is employed in a conventional cooling device. COPYRIGHT: (C)2010,JPO&INPIT |
