| 摘要 |
PROBLEM TO BE SOLVED: To restrain destruction of clusters by preventing complexification of a device and degradation of vacuum degrees inside a vacuum chamber. SOLUTION: A nozzle 5 for producing clusters by blowing off gas for adiabatic expansion is arranged in a cluster production chamber 2 partitioned with a skimmer 4, and the clusters produced are ionized at an ionization device 20. The ionization device 20 includes a plasma generating part 21 generating plasma with the use of gas blown off from the nozzle 5 and detained in the cluster production chamber 2. Then, the clusters produced by the nozzle 5 and plasma 10 generated by the plasma generating part 21 are made collided to ionize the clusters. COPYRIGHT: (C)2010,JPO&INPIT
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