| 摘要 |
An illumination optical system is able to achieve a desired pupil intensity distribution, for example, while suppressing influence of diffracted light arising from the surroundings of a large number of microscopic mirror elements arranged regularly. The illumination optical system (IL) which illuminates an illumination target surface (M) on the basis of light from a light source (1) is provided with a spatial light modulating unit (3), and a distribution forming optical system (4, 5) which forms a predetermined light intensity distribution on an illumination pupil on the basis of a flux of light having traveled via a spatial light modulator. The spatial light modulating unit (3) is provided with the spatial light modulator (3a) having a plurality of optical elements arrayed two-dimensionally and controlled individually, and an angle varying device which varies a relative angle between a diffracted light generating region to generate diffracted light around each of the optical elements, and incident light to the diffracted light generating region.
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