METHOD FOR MAKING STRUCTURES WITH IMPROVED EDGE DEFINITION
摘要
A method includes scanning a radiation beam with respect to a multi-photon curable photoreactive composition. The radiation beam includes a power sufficient to at least partially cure a volume of the multiphoton curable photoreactive composition. The method further includes modifying a characteristic of the radiation beam as the radiation beam is scanned.
申请公布号
EP2232531(A1)
申请公布日期
2010.09.29
申请号
EP20080860374
申请日期
2008.11.06
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
GATES, BRIAN J.;KRASA, ROBERT T.;MARKOWICZ, PRZEMYSLAW P.;SYKORA, CRAIG R.;DEVOE, ROBERT J.;FAKLIS, DEAN