| 摘要 |
A plastics substrate for an electro-optical device e.g. in the form of a film or sheet of e.g.polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polybutylene terephthalate (PBT) or other polyester, polyether sulfone (PES), polyether ether ketone (PEEK)has a layer or stacked layers on a surface thereof providing a moistureand/or oxygenbarrier. The barrier layer may comprise poly-p-xylene, poly(2- chloro-1,4-dimethylbenzene) orpoly(1,4-dichloro-2,5-dimethylbenzene), a metal, a metaloxide, or a nitride and may be of thickness 10 mn and 1µm. An OLED may comprise an anode substrate and/or a cathode substrate as aforesaid. In embodiments a method for forming an OLED is provided comprising providing a plastics substrate, depositing one or more metallic or inorganic barrier layers on the substrate by means of atomic layer epitaxy (ALE), atomic layer deposition (ALD) or atomic layer CVD, depositing one or more organic barrier layers onthe metallic or inorganic layers,and depositing OLED-forming layers on the barrier layers. |
