| 摘要 |
PURPOSE: A pogo pin for a semiconductor manufacturing machine is provided to improve an electrical characteristic by integratedly bending an upper contactor, a lower contactor, and an elastic part. CONSTITUTION: A main body part(110c) is inserted into the loading groove of an insulating main body. An auxiliary body part(110d) is supported by an elastic part(140) and is slid. The mountain shape of contact protrusions(120, 130) are integrated with the main body part and the auxiliary body part. The elastic part is shaped into W shape. A cutting part(142) is connected with the center parts of the main body part and the elastic part.
|
