| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress variations in the height position and coordinate position of a needle resulting from the thermal deformation of a support and a probe substrate, as much as possible. Ž<P>SOLUTION: The electrical connection device includes the support having a lower surface, the probe substrate that is attached to the lower surface of the support and supported by the support, and a plurality of contacts attached to the lower surface of the probe substrate. At least one of the support and the probe substrate has a temperature-adjusting member for receiving electric power and generating or absorbing heat. The support and the probe substrate are made of materials having substantially the same thermal expansion coefficient. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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