| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a display device which can achieve good conduction characteristics between metal and an oxide conductor when a first electrode has a lamination structure of the metal and oxide conductor. Ž<P>SOLUTION: The lamination structure, which sequentially includes a first layer 13A formed of metal and a second layer 13B formed of metal of which oxide is conductive, is formed. Then, an oxide conductor film 13B1 is formed on at least a part of the second layer 13B in a thickness direction by surface oxidation treatment. The second layer 13B is formed by using a metal target to reduce particles. During the surface oxidation treatment, a part of the second layer 13B is covered with an insulating film 14 to leave an inoxidized metal film 13B2 beneath the insulating film 14. Even when an oxidized film is formed on a surface layer of the first layer 13A, layers from the first layer 13A to the oxide conductor film 13B1 are connected with a low contact resistance through the metal film 13B2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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