发明名称 |
PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, AND PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO CLOCK |
摘要 |
A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming bonding electrode films on bonded surfaces of the both wafers; a mount pattern forming step for forming a pair of mount patterns in the cavity; a through hole forming step for forming a pair of through holes in the cavity; a through electrode forming step for forming a pair of through electrodes electrically connected with the pattern in the cavity; a mount step for electrically connecting the pattern and a piezoelectric vibrating strip, a superimposing step for superimposing the both wafers and storing getter materials; a bonding step for anodically bonding the both wafers to fabricating a wafer member; a gettering step for adjusting the degree of vacuum in the interior of the cavity while measuring a series resonance resistance value; and a cutting step for cutting the wafer member into individual pieces.
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申请公布号 |
US2010237739(A1) |
申请公布日期 |
2010.09.23 |
申请号 |
US20100792167 |
申请日期 |
2010.06.02 |
申请人 |
OUCHI KEIICHI;HOSHI YUKI |
发明人 |
OUCHI KEIICHI;HOSHI YUKI |
分类号 |
H01L41/22;H01L41/04;H01L41/053 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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