| 摘要 |
An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus (100) includes: a scanning X-ray source (10) for outputting X-ray; an X-ray detector driving unit (22) on which a plurality of X-ray detectors (23) are mounted, and capable of driving the plurality of X-ray detectors (23) independently; and an image acquisition control mechanism (30) controlling acquisition of image data by X-ray detector driving unit (22) and X-ray detectors (23). A scanning X-ray source (10) emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector (23) such that the X-ray passes through a prescribed inspection area of an object of inspection (20) and enters each X-ray detector (23). Image pick-up by some of the X-ray detectors (23) and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit (30) acquires the image data picked-up by X-ray detectors (23), and a computing unit (70) reconstructs an image in the inspection area based on the image data. |
