发明名称 |
ATOMIC FORCE MICROSCOPY TRUE SHAPE MEASUREMENT METHOD |
摘要 |
An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.
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申请公布号 |
US2010235956(A1) |
申请公布日期 |
2010.09.16 |
申请号 |
US20090404849 |
申请日期 |
2009.03.16 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
LIU HUIWEN;ZHOU LIN;EGBERT DALE;NELSON JONATHAN ARLAND;GUNDERSON PETER |
分类号 |
G12B0021/000008 |
主分类号 |
G12B0021/000008 |
代理机构 |
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