| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of easily manufacturing a polyimide resin mold having a high dimensional stability, and having a small thickness. SOLUTION: This manufacturing method of the polyimide resin mold is provide for forming imide by setting a polyamic acid film having a tensile elastic modulus of 900-1,500 MPa and an elongation of 30-60% in a mold. The polyamic acid film is desirably dried until a residual solvent quantity becomes 5-18 mass% by applying a solution of a polyamic acid on a support. A desirable thickness of the polyimide resin mold provided by this manufacturing method is 10-500μm. COPYRIGHT: (C)2010,JPO&INPIT |
