| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent deterioration of a valve seal due to plasma and radicals in gas by blocking the valve seal of a valve member from ventilation gas at valve opening by a simple configuration in a vacuum valve opened by moving a valve member in the vertical direction with respect to a valve seat face. Ž<P>SOLUTION: An annular partition base 41 for partitioning an isolation chamber 34 internally having the valve member 20 or the like and a ventilation chamber 35 internally having a passage 13 or the like is provided on an inner circumference of a cylindrical valve housing 10 opened with a first opening 11 in one end in the axial direction and a second opening 12 in a direction orthogonal to an axis, in a peripheral position not interfering with opening and closing action of the valve member 20 between a maximum valve opening position and a valve closing position of the valve member 20. A partition plate 40 is arranged, moving along a partition seat 42 of a top face of the partition base at valve opening to close the partition seat, and block the plasma and radicals in the ventilation gas flowing through the passage from the valve seal 21 of the valve member. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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