Probe card, semiconductor testing device including the same, and fuse checking method for probe card

摘要

A probe card according to an exemplary aspect of the present invention includes: a force terminal supplied with a first power supply voltage; a probe needle that supplies a voltage corresponding to the first power supply voltage to a semiconductor integrated circuit to be tested; a fuse connected in series on a first signal line which connects the force terminal and the probe needle; and a fuse check circuit that supplies a voltage different from the first power supply voltage supplied from the force terminal, to a first node located on a signal line between the probe needle and one end of the fuse. The circuit configuration enables checking of a connection state of a fuse prior to product inspection. This makes it possible to perform semiconductor testing with high reliability.