| 摘要 |
PROBLEM TO BE SOLVED: To facilitate design of an ion balance adjustment type ionizer having a function of keeping ion balance between positive ions and negative ions. SOLUTION: The ionizer detects the amounts of positive and negative ions generated from little hand electrodes 4a, 5b and long hand electrodes 4b, 5a by using a ring-shaped sensor 13, and keeps ion balance by feedback control based on an ion current flowing in a detection resistor 15. When a distance between tips of the little hand electrodes 4a, 5b and the long hand electrodes 4b, 5a is L, a distance from a reference position of the tip of the little hand electrode to the sensor 13 is d, and d/L is a positional ratio r, a resistance value R of the detection resistor 15 is determined within a range of 3.87r<SP>3</SP>-1.37r<SP>2</SP>-1.33r+1.42≤R≤-10.28r<SP>3</SP>+48.42r<SP>2</SP>-38.61r+9.50. COPYRIGHT: (C)2010,JPO&INPIT |
