| 摘要 |
PROBLEM TO BE SOLVED: To heighten measurement accuracy by removing a useless error factor caused by moisture entering a moisture-sensitive film from a part other than a barrier film; to measure even a very small amount of moisture with high accuracy; and to avoid increase of cost and a size. SOLUTION: This device includes a moisture sensor part 2 having the moisture-sensitive film 3 and a pair of electrode layers 4u, 4d in surface-contact with both surfaces 3u, 3d of the moisture-sensitive film 3 respectively, wherein one surface 3d of the moisture-sensitive film 3 is attached onto the upper surface 5u of a substrate 5; and a resin covering part 6 for covering at least the side of the moisture-sensitive film 3 between a barrier film F and the upper surface 5u of the substrate 5 excluding the whole or a part of one surface Ff of the barrier film F whose other surface Fs is piled directly or through a resin layer 6r on the other surface 3u of the moisture-sensitive film 3. COPYRIGHT: (C)2010,JPO&INPIT |
