发明名称 VIBRATION-TYPE ANGULAR VELOCITY SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a compact and high-precision vibration-type angular velocity sensor. Ž<P>SOLUTION: The sensor includes a laminated structure where a flat elastic section which unites a weight section to a support so that the weight section vibrates, with respect to the support in the directions of x-axis, y-axis, and z-axis which are orthogonal to one another, and bends in the directions of the x-axis, y-axis, and z-axis accompanying the vibration of the weight section with respect to the support; a z-axis exciting section which excites the weight section in the z-axis direction with respect to the support; a y-axis excitation section; an x-axis detecting section for detecting the vibration in the x-axis direction of the weight section; and a y-axis detecting section are formed. An excitation changeover means which alternately changes the direction of excitation of the weight section between the y-axis direction and the z-axis direction at prescribed time intervals; and an angular speed deriving means which derives an angular velocity around the y-axis from the vibration in the x-axis direction of the weight section after the passage of a predetermined period of time from the time of the changeover, derives an angular velocity around the x-axis from vibration in the y-axis direction and derives an angular velocity around the z-axis from the vibration in the x-axis direction of the weight section, after the passage of a predetermined period of time from the time of a changeover of the direction of excitation of the weight section from the z-axis direction to the y-axis direction. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010197062(A) 申请公布日期 2010.09.09
申请号 JP20090038941 申请日期 2009.02.23
申请人 YAMAHA CORP 发明人 YAMASHITA MASAYOSHI
分类号 G01C19/56;G01P9/04;H01L41/08;H01L41/09;H01L41/18;H03H9/205;H03H9/24 主分类号 G01C19/56
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