| 摘要 |
A work carrier includes a work carrying mechanism, a cooling pipe for cooling the work carrying mechanism by circulation of a coolant, a thermally-conductive elastic member held in contact with the work carrying mechanism and the cooling pipe, and a fixing element for fixing the cooling pipe to the work carrying mechanism. The elastic member is made of aluminum, for example. Before fixed, the elastic member is bent in a cross section perpendicular to the longitudinal direction of the cooling pipe.
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