| 摘要 |
PURPOSE: A substrate processing system is provided to increase productivity by reducing a time of heating and cooling down the substrate. CONSTITUTION: A multi-layer substrate pre-heat treatment unit(170) preheats a plurality of substrates which are loaded successively. A work processing unit process the substrate transferred from the pre-heat treatment unit. The work processing unit comprises a first processing chamber(110), a second processing chamber(120), and a transfer room(130). The multi-layer substrate cooling process unit(180) cools down the substrate transferred from the work processing unit. |
