发明名称 |
DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME |
摘要 |
<p>Disclosed are a spectroscopic optical system and a spectrometer both enabling vertical illumination by means of an optical system using only refractive lenses and enabling wide-band color correction in the DUV-UV (190 to 400 nm) range. The spectroscopic optical system and spectrometer each comprise a light source (100), a folding mirror (110), a field stop (120), an object-side focusing lens system (130) for focusing light onto a sample, an image-side focusing lens (140) disposed on the image forming plane of the object-side focusing lens system, and a spectroscope (150) for dispersing regularly reflected light from the sample. The object-side focusing lens system (130) and the image-side focusing lens system (140) are each a spectroscopic optical system corrected with respect to color in a broad band of wavelength from 190 to 400 nm and configured from only refractive lenses enabling vertical illumination. The working distance (WD) of each lens is set shorter than a predetermined distance, and the doublet interval (D) is set longer than a predetermined distance.</p> |
申请公布号 |
WO2010097880(A1) |
申请公布日期 |
2010.09.02 |
申请号 |
WO2009JP06963 |
申请日期 |
2009.12.17 |
申请人 |
HITACHI, LTD.;OKA, KEIKO;YOSHITAKE, YASUHIRO |
发明人 |
OKA, KEIKO;YOSHITAKE, YASUHIRO |
分类号 |
G01B11/24;G01B11/06;G01J3/02;G01N21/95;G01N21/956;G02B21/16;G11B5/84 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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