| 摘要 |
PURPOSE: A substrate processing system is provided to improve the amount of processed wafers by controlling the transfer of a wafer at each transfer line. CONSTITUTION: A transfer device(50) transfers a loaded substrate(W) in one direction. The transfer device includes a sheet(101) for loading the substrate and a plurality of transfer rolls(100) which is rotatably installed to support and move the sheet. A processing device processes the substrate loaded on the transfer device. |
