FLEXIBLE TRANSPARENT CONDUCTING PLATE USING PLASMA CONTROLLED FLEXIBLE SUBSTRATE AND THE MANUFACTURING METHOD

摘要

PURPOSE: A flexible transparent conductive substrate and a manufacturing method thereof are provided to reduce the damage of a flexible substrate by installing a mesh which has a uniform size inside a deposition device. CONSTITUTION: A transparent conductive layer is formed in a flexible transparent conductive substrate. The transparent conductive layer comprises ZnO in which a transition metal is doped on the flexible substrate(100). A plasma(400) is uniformly applied on the flexible substrate by arranging a mesh(200) between a plasma source and the flexible substrate. The specific resistance value of the transparent conductive layer is 0.02~0.1Ωm. The transmittance of the transparent conductive layer is equal to or greater than 85%.