发明名称 OPTICAL WAVEGUIDE AND OPTICAL WAVEGUIDE MODULE
摘要 <p>Provided is an optical waveguide module that is not only capable of ensuring a high-precision, stable optical connection between an optical element and an optical waveguide but that can also be manufactured easily. As a means to this end, with an optical waveguide module equipped with an optical waveguide that is enclosed with a clad layer and has a mirror section made with a tapered surface at one end, an optical element that has a concave section on a first surface of a semiconductor substrate, and a convex member that is provided on the aforementioned clad layer to overlap planarly with the aforementioned mirror section, the aforementioned convex member is fitted into the aforementioned concave section of the optical element.</p>
申请公布号 WO2010098171(A1) 申请公布日期 2010.09.02
申请号 WO2010JP51222 申请日期 2010.01.29
申请人 HITACHI CHEMICAL COMPANY, LTD.;MATSUOKA, YASUNOBU;SUGAWARA, TOSHIKI 发明人 MATSUOKA, YASUNOBU;SUGAWARA, TOSHIKI
分类号 G02B6/122;G02B6/42 主分类号 G02B6/122
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