发明名称 APPARATUS AND METHOD OF APPLYING FLUX
摘要 PURPOSE: A flux coating device and a method thereof are provided to prevent the damage of a flux by stopping the rotation of a template when the flux reaches the edge of the spreading region of the template. CONSTITUTION: A rotation chuck(110) is rotated by fixing a template which has a flux coating region in an upper side. A flux supply part(120) is arranged in the upper side of the rotation chuck and supplies the flux to the center of the coating region of the template. A sensor(140) is arranged in the upper side of the edge of the flux coating region and senses the flux which reaches the edge of the coating region of the template according to the rotation of the template. A controller controls the rotation chuck in order to stop the rotation of the template when the flux is detected by the sensor.
申请公布号 KR20100096753(A) 申请公布日期 2010.09.02
申请号 KR20090015791 申请日期 2009.02.25
申请人 SECRON CO., LTD. 发明人 EUM, KI SANG;LEEM, JUNG HO
分类号 H01L21/00;H01L21/60 主分类号 H01L21/00
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