NANOFABRICATION METHOD

摘要

The invention relates to a new nanofabrication method especially useful for patterns of two or more different sizes, shapes and/or heights. The method is especially useful for compositions containing block copolymers. The method involves coating the composition onto a multi-patterned substrate, with self-assembly of the polymer components to match the pattern, and the selective removal of the polymer components. A complementary technique is described where a polymer composition comprising domains of different chemical/physical properties can be used to create/change a structure after the application of a stimulus; where the polymeric composition is in bulk form, as a film, or as a coating on an unpatterned or patterned substrate. This structure can be dynamically controlled via the application of the stimulus. The invention is especially useful in the field of integrated circuits, and relates to a means of reducing transistor size and spacing. In addition, this invention can find applications in specialty coatings with antireflective, dirt resistance, controlled adhesion, and piezoelectric properties, and in photovoltaics, energy generation and sensor applications, among others.