| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide plasma treatment equipment capable of maintaining plasma generation stably and generating active species speedily when performing plasma processing to a workpiece where processing regions are set discontinuously. <P>SOLUTION: The plasma treatment equipment 1 includes a pair of electrodes 2 and 3, a power supply circuit 7, a gas supply means 8, a plasma injection port 5, and a control means 170. The apparatus can be switched to either a non-processing mode in which plasma is generated and maintained by cutting off the supply of a treatment gas in a state the gas supply means 8 supplies a carrier gas to a plasma generation space 30 by the control means 170 or a processing mode in which the treatment gas is activated to generate active species by supplying a mix gas of the carrier gas and treatment gas to the plasma generation space 30 and the active species is blown out from the plasma injection port 5 to plasma-treat the surface 101 of the workpiece 10. <P>COPYRIGHT: (C)2010,JPO&INPIT |
